Smart Hysteretic Piezoelectric Actuator for Set and Forget wafer table

Press/Media: Research › Academic

Period	16-Feb-2023

Media contributions

Title	Smart Hysteretic Piezoelectric Actuator for Set and Forget wafer table
Country/Territory	Netherlands
Date	16/02/2023
URL	https://www.hollandhightech.nl/jaaroverzicht2022/home/nieuws/smart-hysteretic-piezoelectric-actuator-for-set-and-forget-wafer-table
Persons	Mónica Acuautla Meneses