Translated title of the contribution | : Method and device for transporting metal elements in the gas phase |
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Dülmann, C. E. (Inventor), Dvorak, J. (Inventor),
Even, J. (Inventor), Niewisch, L. (Inventor), Schädel, M. (Inventor), Türler, A. (Inventor), Wiehl, N. (Inventor) & Yakushev, A. (Inventor),
26-Oct-2012, IPC No. C01G1/04, Patent No. PCT/EP2012/053090, Priority date
24-Feb-2011Research output: Patent