Bistable, tubular phase change actuators for a large scale microfluidic membrane actuator platform

E. Wilhelm*, T. Schwarz, G. Jaworek, A. Voigt, C. Neumann, B. E. Rapp

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

We present an integrated platform with up to 200 bistable, individually controllable, thermally driven microactuators, that can be used as valves or pumps. In our setup the electronic control layer is completely separated from the fluidic actuators. This allows higher integration then achieved using commercially available surface mounted devices (SMD). The three-dimensional heating structure of our tubular actuators ensures optimum heat transfer, which significantly reduces the switching times. Using a demonstrator with six actuators we applied such actuators as microfluidic valves. The platform may also be used for various other applications such as micropipettes, micropumps and refreshable Braille displays.

Original languageEnglish
Title of host publication18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014
PublisherChemical and Biological Microsystems Society
Pages1692-1694
Number of pages3
ISBN (Electronic)9780979806476
Publication statusPublished - 2014
Event18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014 - San Antonio, United States
Duration: 26-Oct-201430-Oct-2014

Publication series

Name18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014

Conference

Conference18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014
Country/TerritoryUnited States
CitySan Antonio
Period26/10/201430/10/2014

Keywords

  • Large scale
  • Microfluidic actuator
  • Refreshable braille display
  • Valve

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