Casimir and hydrodynamic force influence on microelectromechanical system actuation in ambient conditions

Mehdi Sedighi Ghozotkhar, Georgios Palasantzas

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)

Abstract

Casimir and hydrodynamic dissipation forces can strongly influence the actuation of microelectromechanical systems in ambient conditions. The dissipative and stiction dynamics of an actuating system is shown to depend on surface physical processes related to fluid slip and the size of the actuating components. Using phase change materials the Casimir force magnitude can be modulated via amorphous-crystalline phase transitions. The dissipative motion between amorphous coated phase change material components can be changed towards stiction upon crystallization and suitable choice of restoring spring constants. By contrast, amorphization can augment switching from stiction to dissipative dynamics. (C) 2014 AIP Publishing LLC.

Original languageEnglish
Article number074108
Number of pages4
JournalJournal of Materials Research
Volume104
Issue number7
DOIs
Publication statusPublished - 17-Feb-2014

Keywords

  • RELIABLE MEASUREMENTS
  • INTERFACIAL SLIP
  • PROBE
  • CANTILEVERS
  • MICROSCOPY
  • CALIBRATION
  • SURFACES
  • ADHESION
  • PHYSICS
  • SOLIDS

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