Design and characterization of liquid crystal polymer membrane MEMS sensors for underwater sensing applications: A biomimetic of lateral-line fish sensing

Ajay Giri Prakash Kottapalli; Chee Wee Tan; Jianmin Miao; George Barbastathis; Michael Triantafyllou

doi:10.1109/ROBIO.2011.6181450

Design and characterization of liquid crystal polymer membrane MEMS sensors for underwater sensing applications: A biomimetic of lateral-line fish sensing

Ajay Giri Prakash Kottapalli^*, Chee Wee Tan, Jianmin Miao, George Barbastathis, Michael Triantafyllou

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

3 Citations (Scopus)

Abstract

The paper presents the design, fabrication and experimental results of a liquid crystal polymer (LCP) membrane-based pressure sensor array for underwater sensing applications. An artificial lateral-line has been developed, mimicking the features of the functions of the superficial neuromast in a fish. A simple, low cost and robust sensor has been proposed for harsh underwater environment applications. The main features of the sensor developed in this work are an LCP membrane with integrated thin film gold piezoresistors deposited on it. The sensor has been tested for both air and water flow sensing and for underwater object detection. The sensor demonstrates a good sensitivity of 3.695 mV/ms ^-1, large operating range (0 to > 10 ms ^-1 and 0 to > 70 cms ^-1 for air flow and water flow, respectively) and good accuracy in measuring both air and water flow velocities with an average error of only 3.6% of full-scale in comparison with theory.

Original language	English
Title of host publication	2011 IEEE International Conference on Robotics and Biomimetics
Publisher	IEEE
Pages	1194-1199
Number of pages	6
ISBN (Electronic)	978-1-4577-2138-0
ISBN (Print)	978-1-4577-2136-6
DOIs	https://doi.org/10.1109/ROBIO.2011.6181450
Publication status	Published - 1-Dec-2011
Externally published	Yes
Event	2011 IEEE International Conference on Robotics and Biomimetics, ROBIO 2011 - Phuket, Thailand Duration: 7-Dec-2011 → 11-Dec-2011

Conference

Conference	2011 IEEE International Conference on Robotics and Biomimetics, ROBIO 2011
Country/Territory	Thailand
City	Phuket
Period	07/12/2011 → 11/12/2011

Access to Document

10.1109/ROBIO.2011.6181450

Handle.net

Persistent link

Cite this

Kottapalli, A. G. P., Tan, C. W., Miao, J., Barbastathis, G., & Triantafyllou, M. (2011). Design and characterization of liquid crystal polymer membrane MEMS sensors for underwater sensing applications: A biomimetic of lateral-line fish sensing. In 2011 IEEE International Conference on Robotics and Biomimetics (pp. 1194-1199). Article 6181450 IEEE. https://doi.org/10.1109/ROBIO.2011.6181450

@inproceedings{883f83d19eb94345a9f6f06685d5b06d,

title = "Design and characterization of liquid crystal polymer membrane MEMS sensors for underwater sensing applications: A biomimetic of lateral-line fish sensing",

abstract = "The paper presents the design, fabrication and experimental results of a liquid crystal polymer (LCP) membrane-based pressure sensor array for underwater sensing applications. An artificial lateral-line has been developed, mimicking the features of the functions of the superficial neuromast in a fish. A simple, low cost and robust sensor has been proposed for harsh underwater environment applications. The main features of the sensor developed in this work are an LCP membrane with integrated thin film gold piezoresistors deposited on it. The sensor has been tested for both air and water flow sensing and for underwater object detection. The sensor demonstrates a good sensitivity of 3.695 mV/ms -1, large operating range (0 to > 10 ms -1 and 0 to > 70 cms -1 for air flow and water flow, respectively) and good accuracy in measuring both air and water flow velocities with an average error of only 3.6% of full-scale in comparison with theory.",

author = "Kottapalli, {Ajay Giri Prakash} and Tan, {Chee Wee} and Jianmin Miao and George Barbastathis and Michael Triantafyllou",

year = "2011",

month = dec,

day = "1",

doi = "10.1109/ROBIO.2011.6181450",

language = "English",

isbn = "978-1-4577-2136-6 ",

pages = "1194--1199",

booktitle = "2011 IEEE International Conference on Robotics and Biomimetics",

publisher = "IEEE",

note = "2011 IEEE International Conference on Robotics and Biomimetics, ROBIO 2011 ; Conference date: 07-12-2011 Through 11-12-2011",

}

Kottapalli, AGP, Tan, CW, Miao, J, Barbastathis, G & Triantafyllou, M 2011, Design and characterization of liquid crystal polymer membrane MEMS sensors for underwater sensing applications: A biomimetic of lateral-line fish sensing. in 2011 IEEE International Conference on Robotics and Biomimetics., 6181450, IEEE, pp. 1194-1199, 2011 IEEE International Conference on Robotics and Biomimetics, ROBIO 2011, Phuket, Thailand, 07/12/2011. https://doi.org/10.1109/ROBIO.2011.6181450

Design and characterization of liquid crystal polymer membrane MEMS sensors for underwater sensing applications: A biomimetic of lateral-line fish sensing. / Kottapalli, Ajay Giri Prakash; Tan, Chee Wee; Miao, Jianmin et al.
2011 IEEE International Conference on Robotics and Biomimetics. IEEE, 2011. p. 1194-1199 6181450.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Design and characterization of liquid crystal polymer membrane MEMS sensors for underwater sensing applications

T2 - 2011 IEEE International Conference on Robotics and Biomimetics, ROBIO 2011

AU - Kottapalli, Ajay Giri Prakash

AU - Tan, Chee Wee

AU - Miao, Jianmin

AU - Barbastathis, George

AU - Triantafyllou, Michael

PY - 2011/12/1

Y1 - 2011/12/1

N2 - The paper presents the design, fabrication and experimental results of a liquid crystal polymer (LCP) membrane-based pressure sensor array for underwater sensing applications. An artificial lateral-line has been developed, mimicking the features of the functions of the superficial neuromast in a fish. A simple, low cost and robust sensor has been proposed for harsh underwater environment applications. The main features of the sensor developed in this work are an LCP membrane with integrated thin film gold piezoresistors deposited on it. The sensor has been tested for both air and water flow sensing and for underwater object detection. The sensor demonstrates a good sensitivity of 3.695 mV/ms -1, large operating range (0 to > 10 ms -1 and 0 to > 70 cms -1 for air flow and water flow, respectively) and good accuracy in measuring both air and water flow velocities with an average error of only 3.6% of full-scale in comparison with theory.

AB - The paper presents the design, fabrication and experimental results of a liquid crystal polymer (LCP) membrane-based pressure sensor array for underwater sensing applications. An artificial lateral-line has been developed, mimicking the features of the functions of the superficial neuromast in a fish. A simple, low cost and robust sensor has been proposed for harsh underwater environment applications. The main features of the sensor developed in this work are an LCP membrane with integrated thin film gold piezoresistors deposited on it. The sensor has been tested for both air and water flow sensing and for underwater object detection. The sensor demonstrates a good sensitivity of 3.695 mV/ms -1, large operating range (0 to > 10 ms -1 and 0 to > 70 cms -1 for air flow and water flow, respectively) and good accuracy in measuring both air and water flow velocities with an average error of only 3.6% of full-scale in comparison with theory.

U2 - 10.1109/ROBIO.2011.6181450

DO - 10.1109/ROBIO.2011.6181450

M3 - Conference contribution

AN - SCOPUS:84860739185

SN - 978-1-4577-2136-6

SP - 1194

EP - 1199

BT - 2011 IEEE International Conference on Robotics and Biomimetics

PB - IEEE

Y2 - 7 December 2011 through 11 December 2011

ER -

Design and characterization of liquid crystal polymer membrane MEMS sensors for underwater sensing applications: A biomimetic of lateral-line fish sensing

Abstract

Conference

Access to Document

Handle.net

Fingerprint

Cite this