Abstract
Distributed feedback lasers with first-order vertical grating based on AlInGaAs-InAs-InP quantum-dash lasers were fabricated by electron beam lithography and Cl-2-Ar reactive ion etching with an electron cyclotron resonance source. Low threshold currents and single-mode operation with sidemode suppression ratios of 48 dB and a direct modulation bandwidth of 5.5 GHz were demonstrated.
Original language | English |
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Pages (from-to) | 264-266 |
Number of pages | 3 |
Journal | IEEE Photonics Technology Letters |
Volume | 19 |
Issue number | 5-8 |
DOIs | |
Publication status | Published - 2007 |
Externally published | Yes |
Keywords
- deep etching
- distributed feedback (DFB) laser
- quantum dot
- vertical grating
- DISTRIBUTED REFLECTOR LASERS
- OPERATION
- MIRRORS