DFB lasers with deeply etched vertical grating based on InAs-InP quantum-dash structures

Klaus Mathwig*, Wolfgang Kaiser, Andre Somers, Johann Peter Reithmaier, Alfred Forchel, Kazuya Ohira, Saeed M. Ullah, Shigehisa Arai

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

Abstract

Distributed feedback lasers with first-order vertical grating based on AlInGaAs-InAs-InP quantum-dash lasers were fabricated by electron beam lithography and Cl-2-Ar reactive ion etching with an electron cyclotron resonance source. Low threshold currents and single-mode operation with sidemode suppression ratios of 48 dB and a direct modulation bandwidth of 5.5 GHz were demonstrated.

Original languageEnglish
Pages (from-to)264-266
Number of pages3
JournalIEEE Photonics Technology Letters
Volume19
Issue number5-8
DOIs
Publication statusPublished - 2007
Externally publishedYes

Keywords

  • deep etching
  • distributed feedback (DFB) laser
  • quantum dot
  • vertical grating
  • DISTRIBUTED REFLECTOR LASERS
  • OPERATION
  • MIRRORS

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