Direct Laser patterning of a gas sensor on flexible substrate

Mónica Isela Acuautla Meneses; Sandrine Bernardini; Laurent  Gallais; Marc Bendahan

doi:10.1016/j.proeng.2014.11.300

Direct Laser patterning of a gas sensor on flexible substrate

Mónica Isela Acuautla Meneses, Sandrine Bernardini, Laurent Gallais, Marc Bendahan

Research output: Contribution to journal › Article › Academic › peer-review

6 Citations (Scopus)

41 Downloads (Pure)

Abstract

Flexible gas sensor fabricated by direct laser patterning and its gas sensing properties towards ozone and ammonia are reported.The flexible platform consists in Ti/Pt interdigited electrodes for gas detection and a microheater device. The platform validation has been realized by thermal simulation and its electrical properties have been also studied. The gas sensing properties were investigated using a commercial ink of ZnO nanoparticles at several concentrations and temperatures. The sensor presents excellent responses toward ammonia and ozone at 300 °C and 200 C° respectively, with good reproducibility, and fast response
and recovery time in a wide range of concentrations

Original language	English
Pages (from-to)	899-902
Number of pages	4
Journal	Procedia Engineering
Volume	87
DOIs	https://doi.org/10.1016/j.proeng.2014.11.300
Publication status	Published - 2014
Externally published	Yes

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10.1016/j.proeng.2014.11.300Licence: CC BY-NC-ND

Direct Laser Patterning of a Gas Sensor on Flexible SubstrateFinal publisher's version, 335 KBLicence: CC BY-NC-ND

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6 Citations
1 Conference contribution

Direct laser patterning of a gas sensor on flexible substrate (Presentation)
Acuautla, M., Bernardini, S., Gallais, L. & Bendahan, M., 2014, Eurosensors 2014.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Cite this

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title = "Direct Laser patterning of a gas sensor on flexible substrate",

abstract = "Flexible gas sensor fabricated by direct laser patterning and its gas sensing properties towards ozone and ammonia are reported.The flexible platform consists in Ti/Pt interdigited electrodes for gas detection and a microheater device. The platform validation has been realized by thermal simulation and its electrical properties have been also studied. The gas sensing properties were investigated using a commercial ink of ZnO nanoparticles at several concentrations and temperatures. The sensor presents excellent responses toward ammonia and ozone at 300 °C and 200 C° respectively, with good reproducibility, and fast responseand recovery time in a wide range of concentrations",

author = "{Acuautla Meneses}, {M{\'o}nica Isela} and Sandrine Bernardini and Laurent Gallais and Marc Bendahan",

year = "2014",

doi = "10.1016/j.proeng.2014.11.300",

language = "English",

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pages = "899--902",

journal = "Procedia Engineering",

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AU - Acuautla Meneses, Mónica Isela

AU - Bernardini, Sandrine

AU - Gallais, Laurent

AU - Bendahan, Marc

PY - 2014

Y1 - 2014

N2 - Flexible gas sensor fabricated by direct laser patterning and its gas sensing properties towards ozone and ammonia are reported.The flexible platform consists in Ti/Pt interdigited electrodes for gas detection and a microheater device. The platform validation has been realized by thermal simulation and its electrical properties have been also studied. The gas sensing properties were investigated using a commercial ink of ZnO nanoparticles at several concentrations and temperatures. The sensor presents excellent responses toward ammonia and ozone at 300 °C and 200 C° respectively, with good reproducibility, and fast responseand recovery time in a wide range of concentrations

AB - Flexible gas sensor fabricated by direct laser patterning and its gas sensing properties towards ozone and ammonia are reported.The flexible platform consists in Ti/Pt interdigited electrodes for gas detection and a microheater device. The platform validation has been realized by thermal simulation and its electrical properties have been also studied. The gas sensing properties were investigated using a commercial ink of ZnO nanoparticles at several concentrations and temperatures. The sensor presents excellent responses toward ammonia and ozone at 300 °C and 200 C° respectively, with good reproducibility, and fast responseand recovery time in a wide range of concentrations

U2 - 10.1016/j.proeng.2014.11.300

DO - 10.1016/j.proeng.2014.11.300

M3 - Article

SN - 1877-7058

VL - 87

SP - 899

EP - 902

JO - Procedia Engineering

JF - Procedia Engineering

ER -

Direct Laser patterning of a gas sensor on flexible substrate

Abstract

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Research output

Direct laser patterning of a gas sensor on flexible substrate (Presentation)

Cite this