Direct Laser patterning of a gas sensor on flexible substrate

Mónica Isela Acuautla Meneses, Sandrine Bernardini, Laurent Gallais, Marc Bendahan

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Abstract

Flexible gas sensor fabricated by direct laser patterning and its gas sensing properties towards ozone and ammonia are reported.The flexible platform consists in Ti/Pt interdigited electrodes for gas detection and a microheater device. The platform validation has been realized by thermal simulation and its electrical properties have been also studied. The gas sensing properties were investigated using a commercial ink of ZnO nanoparticles at several concentrations and temperatures. The sensor presents excellent responses toward ammonia and ozone at 300 °C and 200 C° respectively, with good reproducibility, and fast response
and recovery time in a wide range of concentrations
Original languageEnglish
Pages (from-to)899-902
Number of pages4
JournalProcedia Engineering
Volume87
DOIs
Publication statusPublished - 2014
Externally publishedYes

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