Dynamic smoothening and tribological properties of pulsed-DC sputtered DLC based nanocomposite films

K. P. Shaha*, Y. T. Pei, C. Q. Chen, J. Th. M. De Hosson

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    Abstract

    Interface roughness and dynamic growth behavior of TiC/a-C nanocomposite films deposited by pulsed-DC magnetron sputtering were studied using atomic force microscopy and scanning electron microscopy. Upon increasing the intensity of concurrent ion impingement by raising the frequency of pulsed-DC sputtering, a transition from dynamic roughening to dynamic smoothening is revealed in the growth behavior of TiC/a-C nanocomposite films. Analyses of surface morphology and growth conditions imply that there is a transition of dominating growth mechanism from geometric shadowing to surface diffusion driven by impact-induced atomistic downhill flow process due to enhanced impingement of Ar+ ions, which occurs upon the change of pulse frequency from 100 kHz to 350 kHz. Also ultra-smooth TiC/a-C:H films were successfully grown on initial rough steel substrates (Sa similar to 6 nm) by pulsed-DC sputtering at 200 and 350 kHz frequency. These nanocomposite films exhibit superb toughness, vicar resistance and ultralow friction.

    Original languageEnglish
    Title of host publicationSURFACE EFFECTS AND CONTACT MECHANICS IX
    EditorsJTM DeHosson, CA Brebbia
    Place of PublicationSOUTHAMPTON
    PublisherWIT PRESS/COMPUTATIONAL MECHANICS PUBLICATIONS
    ChapterIX
    Pages3-11
    Number of pages9
    ISBN (Print)978-1-84564-186-3
    DOIs
    Publication statusPublished - 2009
    Event9th International Conference on Surface Effects and Contract Mechanics - , Portugal
    Duration: 9-Jun-200911-Jun-2009

    Publication series

    NameWIT Transactions on Engineering Sciences
    PublisherWIT PRESS/COMPUTATIONAL MECHANICS PUBLICATIONS
    ISSN (Print)1746-4471

    Other

    Other9th International Conference on Surface Effects and Contract Mechanics
    Country/TerritoryPortugal
    Period09/06/200911/06/2009

    Keywords

    • dynamic roughening
    • smoothening
    • nanocomposite
    • rough substrates
    • pulsed-DC sputtering
    • GROWTH
    • EVOLUTION
    • COATINGS
    • SURFACES
    • CARBON

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