Extreme ultraviolet light from a tin plasma driven by a 2-mu m-wavelength laser

L. Behnke, R. Schupp, Z. Bouza, M. Bayraktar, Z. Mazzotta, R. Meijer, J. Sheil, S. Witte, W. Ubachs, R. Hoekstra, O. O. Versolato*

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

41 Citations (Scopus)
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An experimental study of laser-produced plasmas is performed by irradiating a planar tin target by laser pulses, of 4.8 ns duration, produced from a KTP-based 2-mu m-wavelength master oscillator power amplifier. Comparative spectroscopic investigations are performed for plasmas driven by 1-mu m- and 2-mu m-wavelength pulsed lasers, over a wide range of laser intensities spanning 0.5 - 5 x 10(11) W/cm(-2). Similar extreme ultraviolet (EUV) spectra in the 5.5-25.5 nm wavelength range and underlying plasma ionicities are obtained when the intensity ratio is kept fixed at I-1 mu m/I-2 mu(m) = 2.4(7). Crucially, the conversion efficiency (CE) of 2-mu m-laser energy into radiation within a 2% bandwidth centered at 13.5 nm relevant for industrial applications is found to be a factor of two larger, at a 60 degree observation angle, than in the case of the denser 1-mu m-laser-driven plasma. Our findings regarding the scaling of the optimum laser intensity for efficient EUV generation and CE with drive laser wavelength are extended to other laser wavelengths using available literature data. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

Original languageEnglish
Pages (from-to)4475-4487
Number of pages13
JournalOptics Express
Issue number3
Publication statusPublished - 1-Feb-2021


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