@inproceedings{b69c6fc348ee4d538238e74a97508115,
title = "Fast electrochemical membrane actuator: Design, fabrication and preliminary testing",
abstract = "An actuator based on water electrolysis with a fast change of voltage polarity is presented. It demonstrates a new actuation principle allowing significant increase the operation frequency of the device due to fast termination of the produced gas. The actuator consists of a working chamber with metallic electrodes and supplying channels filled with an electrolyte. The chamber is formed in a layer of SU-8 and covered by a flexible polydimethylsiloxane membrane, which deforms as the pressure in the chamber increases. Design, fabrication procedure, and first tests of the actuator are described.",
author = "Uvarov, {I. V.} and Postnikov, {A. V.} and Shlepakov, {P. S.} and Naumov, {V. V.} and Koroleva, {O. M.} and Izyumov, {M. O.} and Svetovoy, {V. B.}",
year = "2017",
month = nov,
day = "23",
doi = "10.1088/1742-6596/917/8/082006",
language = "English",
series = "Journal of Physics: Conference Series",
publisher = "IoP Publishing",
booktitle = "Electric, Magnetic and Microwave Devices",
edition = "8",
note = "4th International School and Conference {"}Saint Petersburg OPEN 2017{"} on Optoelectronics, Photonics, Engineering and Nanostructures ; Conference date: 03-04-2017 Through 06-04-2017",
}