Abstract
This chapter explores the deposition of ferrite films using a myriad of physical, chemical, and mechanical deposition technologies, including molecular beam epitaxy, pulsed-laser deposition, chemical vapor deposition, sputtering, atomic layer deposition, screen printing, spin-spray, and others. Ferrites are magnetic oxides that exist in spinel, garnet, and hexaferrite structures. The chapter presents a brief discussion of each material phase in terms of their crystal structure, chemistry, and magnetic properties. This discussion is intended to provide the reader a broad overview of the fundamental physical and chemical principles required to better understand the functional properties and utility of ferrites. The chapter also explains challenges such as process compatibility, substrate lattice matching, crystal quality, and process yields in the context of realizing the potential of new technologies that embrace the powerful multifunctionality of magneto dielectric ferrites.
Original language | English |
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Title of host publication | Modern Ferrites |
Subtitle of host publication | Basic Principles, Processing and Properties |
Editors | Vincent G. Harris |
Publisher | John Wiley and Sons Ltd |
Chapter | 10 |
Pages | 295-411 |
Number of pages | 117 |
Volume | 1 |
ISBN (Electronic) | 9781118971499 |
ISBN (Print) | 9781118971468 |
DOIs | |
Publication status | Published - 28-Oct-2022 |