Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles

M. Asadnia; A. G P Kottapalli; Z. Shen; J. M. Miao; G. Barbastathis; M. S. Triantafyllou

doi:10.1109/MEMSYS.2013.6474193

Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles

M. Asadnia
, A. G P Kottapalli
, Z. Shen
, J. M. Miao^*
, G. Barbastathis
, M. S. Triantafyllou

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

17 Citations (Scopus)

Abstract

In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater sensing. Individual sensors have a low footprint of 1.8 × 1.8 mm² and do not require any power for their operation. An array of 2 by 5 sensors is fabricated, packaged and tested for use on marine vehicle. The proposed array is capable of locating underwater objects by transducing the pressure variations generated by the stimulus.

Original language	English
Title of host publication	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	126-129
Number of pages	4
ISBN (Print)	9781467356558
DOIs	https://doi.org/10.1109/MEMSYS.2013.6474193
Publication status	Published - 2-Apr-2013
Event	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan Duration: 20-Jan-2013 → 24-Jan-2013

Conference

Conference	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Country/Territory	Taiwan
City	Taipei
Period	20/01/2013 → 24/01/2013

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Asadnia, M., Kottapalli, A. G. P., Shen, Z., Miao, J. M., Barbastathis, G., & Triantafyllou, M. S. (2013). Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 126-129). Article 6474193 Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/MEMSYS.2013.6474193

@inproceedings{e63563c9f3f3476e926746f794911508,

title = "Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles",

abstract = "In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater sensing. Individual sensors have a low footprint of 1.8 × 1.8 mm2 and do not require any power for their operation. An array of 2 by 5 sensors is fabricated, packaged and tested for use on marine vehicle. The proposed array is capable of locating underwater objects by transducing the pressure variations generated by the stimulus.",

author = "M. Asadnia and Kottapalli, \{A. G P\} and Z. Shen and Miao, \{J. M.\} and G. Barbastathis and Triantafyllou, \{M. S.\}",

year = "2013",

month = apr,

day = "2",

doi = "10.1109/MEMSYS.2013.6474193",

language = "English",

isbn = "9781467356558",

pages = "126--129",

booktitle = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

note = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 ; Conference date: 20-01-2013 Through 24-01-2013",

}

Asadnia, M, Kottapalli, AGP, Shen, Z, Miao, JM, Barbastathis, G & Triantafyllou, MS 2013, Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles. in IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013., 6474193, Institute of Electrical and Electronics Engineers (IEEE), pp. 126-129, IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013, Taipei, Taiwan, 20/01/2013. https://doi.org/10.1109/MEMSYS.2013.6474193

Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles. / Asadnia, M.; Kottapalli, A. G P; Shen, Z. et al.
IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. Institute of Electrical and Electronics Engineers (IEEE), 2013. p. 126-129 6474193.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles

AU - Asadnia, M.

AU - Kottapalli, A. G P

AU - Shen, Z.

AU - Miao, J. M.

AU - Barbastathis, G.

AU - Triantafyllou, M. S.

PY - 2013/4/2

Y1 - 2013/4/2

N2 - In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater sensing. Individual sensors have a low footprint of 1.8 × 1.8 mm2 and do not require any power for their operation. An array of 2 by 5 sensors is fabricated, packaged and tested for use on marine vehicle. The proposed array is capable of locating underwater objects by transducing the pressure variations generated by the stimulus.

AB - In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater sensing. Individual sensors have a low footprint of 1.8 × 1.8 mm2 and do not require any power for their operation. An array of 2 by 5 sensors is fabricated, packaged and tested for use on marine vehicle. The proposed array is capable of locating underwater objects by transducing the pressure variations generated by the stimulus.

UR - https://www.scopus.com/pages/publications/84875445452

U2 - 10.1109/MEMSYS.2013.6474193

DO - 10.1109/MEMSYS.2013.6474193

M3 - Conference contribution

AN - SCOPUS:84875445452

SN - 9781467356558

SP - 126

EP - 129

BT - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013

PB - Institute of Electrical and Electronics Engineers (IEEE)

T2 - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013

Y2 - 20 January 2013 through 24 January 2013

ER -

Asadnia M, Kottapalli AGP, Shen Z, Miao JM, Barbastathis G, Triantafyllou MS. Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. Institute of Electrical and Electronics Engineers (IEEE). 2013. p. 126-129. 6474193 doi: 10.1109/MEMSYS.2013.6474193

Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles

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