Abstract
New polysilsesquioxanes are prepared by incorporating tetrahydropyranyl moieties into silsesquioxanes. These polymers, which are soluble in organic solvents, are synthesized by means of HCl-catalysed reactions.
| Original language | English |
|---|---|
| Pages (from-to) | 3131-3132 |
| Number of pages | 2 |
| Journal | Polymer |
| Volume | 35 |
| Issue number | 14 |
| Publication status | Published - 1994 |
Keywords
- POLYSILSESQUIOXANES
- TETRAHYDROPYRANYL
- SYNTHESIS
- ELECTRON-BEAM LITHOGRAPHY
- CHEMICAL AMPLIFICATION
- NEGATIVE-RESIST
- CONDENSATION
- SILICON
- SYSTEMS
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