Growth and crystallization of sio2/geo2 thin films on si(100) substrates

Jordi Antoja-Lleonart; Václav Ocelík; Silang Zhou; Kit de Hond; Gertjan Koster; Guus Rijnders; Beatriz Noheda

doi:10.3390/nano11071654

Growth and crystallization of sio₂/geo₂ thin films on si(100) substrates

Jordi Antoja-Lleonart, Václav Ocelík, Silang Zhou, Kit de Hond, Gertjan Koster, Guus Rijnders, Beatriz Noheda^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

3 Citations (Scopus)

108 Downloads (Pure)

Abstract

The growth of α-quartz-based piezoelectric thin films opens the door to higher-frequency electromechanical devices than those available through top-down approaches. We report on the growth of SiO₂/GeO₂ thin films by pulsed laser deposition and their subsequent crystallization. By introducing a devitrifying agent uniformly within the film, we are able to obtain the α-quartz phase in the form of platelets with lateral sizes above 100 µm at accessible temperatures. Films containing different amounts of devitrifying agent are investigated, and their crystallinity is ascertained with X-ray diffraction and electron back-scatter diffraction. Our work highlights the difficulty in crystallization when competing phases arise that have markedly different crystalline orientation.

Original language	English
Article number	1654
Journal	Nanomaterials
Volume	11
Issue number	7
DOIs	https://doi.org/10.3390/nano11071654
Publication status	Published - Jul-2021

Keywords

Crystallization
Devitrifying agent
Electron back-scatter diffraction
Pulsed laser deposition
Quartz
Silica thin films

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10.3390/nano11071654Licence: CC BY

Growth and Crystallization of SiO2/GeO2Thin Films onSi(100) SubstratesFinal publisher's version, 24.1 MBLicence: CC BY

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title = "Growth and crystallization of sio2/geo2 thin films on si(100) substrates",

abstract = "The growth of α-quartz-based piezoelectric thin films opens the door to higher-frequency electromechanical devices than those available through top-down approaches. We report on the growth of SiO2/GeO2 thin films by pulsed laser deposition and their subsequent crystallization. By introducing a devitrifying agent uniformly within the film, we are able to obtain the α-quartz phase in the form of platelets with lateral sizes above 100 µm at accessible temperatures. Films containing different amounts of devitrifying agent are investigated, and their crystallinity is ascertained with X-ray diffraction and electron back-scatter diffraction. Our work highlights the difficulty in crystallization when competing phases arise that have markedly different crystalline orientation.",

keywords = "Crystallization, Devitrifying agent, Electron back-scatter diffraction, Pulsed laser deposition, Quartz, Silica thin films",

author = "Jordi Antoja-Lleonart and V{\'a}clav Ocel{\'i}k and Silang Zhou and {de Hond}, Kit and Gertjan Koster and Guus Rijnders and Beatriz Noheda",

note = "Funding Information: Funding: This research was funded with NWO{\textquoteright}s TOP-PUNT grant 718.016002. Publisher Copyright: {\textcopyright} 2021 by the authors. Licensee MDPI, Basel, Switzerland. Copyright: Copyright 2021 Elsevier B.V., All rights reserved.",

year = "2021",

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doi = "10.3390/nano11071654",

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AU - Antoja-Lleonart, Jordi

AU - Ocelík, Václav

AU - Zhou, Silang

AU - de Hond, Kit

AU - Koster, Gertjan

AU - Rijnders, Guus

AU - Noheda, Beatriz

N1 - Funding Information: Funding: This research was funded with NWO’s TOP-PUNT grant 718.016002. Publisher Copyright: © 2021 by the authors. Licensee MDPI, Basel, Switzerland. Copyright: Copyright 2021 Elsevier B.V., All rights reserved.

PY - 2021/7

Y1 - 2021/7

N2 - The growth of α-quartz-based piezoelectric thin films opens the door to higher-frequency electromechanical devices than those available through top-down approaches. We report on the growth of SiO2/GeO2 thin films by pulsed laser deposition and their subsequent crystallization. By introducing a devitrifying agent uniformly within the film, we are able to obtain the α-quartz phase in the form of platelets with lateral sizes above 100 µm at accessible temperatures. Films containing different amounts of devitrifying agent are investigated, and their crystallinity is ascertained with X-ray diffraction and electron back-scatter diffraction. Our work highlights the difficulty in crystallization when competing phases arise that have markedly different crystalline orientation.

AB - The growth of α-quartz-based piezoelectric thin films opens the door to higher-frequency electromechanical devices than those available through top-down approaches. We report on the growth of SiO2/GeO2 thin films by pulsed laser deposition and their subsequent crystallization. By introducing a devitrifying agent uniformly within the film, we are able to obtain the α-quartz phase in the form of platelets with lateral sizes above 100 µm at accessible temperatures. Films containing different amounts of devitrifying agent are investigated, and their crystallinity is ascertained with X-ray diffraction and electron back-scatter diffraction. Our work highlights the difficulty in crystallization when competing phases arise that have markedly different crystalline orientation.

KW - Crystallization

KW - Devitrifying agent

KW - Electron back-scatter diffraction

KW - Pulsed laser deposition

KW - Quartz

KW - Silica thin films

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