Growth of flat SrRuO3 (111) thin films suitable as bottom electrodes in heterostructures

D. Rubi; A. H. G. Vlooswijk; Beatriz Noheda

doi:10.1016/j.tsf.2008.09.106

Growth of flat SrRuO3 (111) thin films suitable as bottom electrodes in heterostructures

D. Rubi^*, A. H. G. Vlooswijk, Beatriz Noheda

^*Corresponding author for this work

Zernike Institute for Advanced Materials

Research output: Contribution to journal › Article › Academic › peer-review

20 Citations (Scopus)

Abstract

Thin film growth of ferroelectric or multiferroic materials on SrTiO3(111) with a buffer electrode has been hampered by the difficulty of growing flat electrodes on this polar orientation. We report on the growth and characterization of SrRuO3 thin films deposited by Pulsed laser deposition on SrTiO3(111). We show that our SrRuO3(111) films are epitaxial and display magnetic bulk-like properties. Films presenting a thickness between 20 and 30 nm are found to be very flat and therefore suitable as bottom electrodes in heterostructures. (C) 2008 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	1904-1907
Number of pages	4
Journal	Thin Solid Films
Volume	517
Issue number	6
DOIs	https://doi.org/10.1016/j.tsf.2008.09.106
Publication status	Published - 30-Jan-2009

Keywords

Strontium ruthanate
Atomic force microscopy
Surface roughness
Ferromagnetic metallic electrodes
EPITAXIAL SRRUO3
001 SRTIO3
CRYSTAL
TRANSITION
MODE

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title = "Growth of flat SrRuO3 (111) thin films suitable as bottom electrodes in heterostructures",

abstract = "Thin film growth of ferroelectric or multiferroic materials on SrTiO3(111) with a buffer electrode has been hampered by the difficulty of growing flat electrodes on this polar orientation. We report on the growth and characterization of SrRuO3 thin films deposited by Pulsed laser deposition on SrTiO3(111). We show that our SrRuO3(111) films are epitaxial and display magnetic bulk-like properties. Films presenting a thickness between 20 and 30 nm are found to be very flat and therefore suitable as bottom electrodes in heterostructures. (C) 2008 Elsevier B.V. All rights reserved.",

keywords = "Strontium ruthanate, Atomic force microscopy, Surface roughness, Ferromagnetic metallic electrodes, EPITAXIAL SRRUO3, 001 SRTIO3, CRYSTAL, TRANSITION, MODE",

author = "D. Rubi and Vlooswijk, {A. H. G.} and Beatriz Noheda",

year = "2009",

month = jan,

day = "30",

doi = "10.1016/j.tsf.2008.09.106",

language = "English",

volume = "517",

pages = "1904--1907",

journal = "Thin Solid Films",

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T1 - Growth of flat SrRuO3 (111) thin films suitable as bottom electrodes in heterostructures

AU - Rubi, D.

AU - Vlooswijk, A. H. G.

AU - Noheda, Beatriz

PY - 2009/1/30

Y1 - 2009/1/30

N2 - Thin film growth of ferroelectric or multiferroic materials on SrTiO3(111) with a buffer electrode has been hampered by the difficulty of growing flat electrodes on this polar orientation. We report on the growth and characterization of SrRuO3 thin films deposited by Pulsed laser deposition on SrTiO3(111). We show that our SrRuO3(111) films are epitaxial and display magnetic bulk-like properties. Films presenting a thickness between 20 and 30 nm are found to be very flat and therefore suitable as bottom electrodes in heterostructures. (C) 2008 Elsevier B.V. All rights reserved.

AB - Thin film growth of ferroelectric or multiferroic materials on SrTiO3(111) with a buffer electrode has been hampered by the difficulty of growing flat electrodes on this polar orientation. We report on the growth and characterization of SrRuO3 thin films deposited by Pulsed laser deposition on SrTiO3(111). We show that our SrRuO3(111) films are epitaxial and display magnetic bulk-like properties. Films presenting a thickness between 20 and 30 nm are found to be very flat and therefore suitable as bottom electrodes in heterostructures. (C) 2008 Elsevier B.V. All rights reserved.

KW - Strontium ruthanate

KW - Atomic force microscopy

KW - Surface roughness

KW - Ferromagnetic metallic electrodes

KW - EPITAXIAL SRRUO3

KW - 001 SRTIO3

KW - CRYSTAL

KW - TRANSITION

KW - MODE

U2 - 10.1016/j.tsf.2008.09.106

DO - 10.1016/j.tsf.2008.09.106

M3 - Article

SN - 0040-6090

VL - 517

SP - 1904

EP - 1907

JO - Thin Solid Films

JF - Thin Solid Films

IS - 6

ER -

Growth of flat SrRuO3 (111) thin films suitable as bottom electrodes in heterostructures

Abstract

Keywords

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