Hydrogen implantation defects in MgO

A. van Veen; H. Schut; A.V. Fedorov; E.A.C. Neeft; R.J.M. Konings; B.J. Kooi; J.T.M. de Hosson

doi:10.1016/S0168-583X(98)00600-4

Hydrogen implantation defects in MgO

A. van Veen, H. Schut, A.V. Fedorov, E.A.C. Neeft, R.J.M. Konings, B.J. Kooi, J.T.M. de Hosson

Research output: Contribution to journal › Article › Academic › peer-review

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Original language	Dutch
Pages (from-to)	216 - 220
Number of pages	5
Journal	Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
Volume	147
Issue number	1-4
DOIs	https://doi.org/10.1016/S0168-583X(98)00600-4
Publication status	Published - 1999
Event	Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics, at the Spring Meeting of the European-Materials-Research-Society - , France Duration: 16-Jun-1998 → 19-Jun-1998

Keywords

positron
ion implantation
hydrogen
deuterium
oxide
SILICON
OXIDE

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10.1016/S0168-583X(98)00600-4

1999NuclInstrMethPhysResBvVeen.pdfFinal publisher's version, 140 KB

Cite this

@article{7a591d2bc3dd44709fa36bad834ace07,

title = "Hydrogen implantation defects in MgO",

keywords = "positron, ion implantation, hydrogen, deuterium, oxide, SILICON, OXIDE",

author = "{van Veen}, A. and H. Schut and A.V. Fedorov and E.A.C. Neeft and R.J.M. Konings and B.J. Kooi and {de Hosson}, J.T.M.",

note = "Journal JAN 153RK NUCL INSTRUM METH PHYS RES B; Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics, at the Spring Meeting of the European-Materials-Research-Society ; Conference date: 16-06-1998 Through 19-06-1998",

year = "1999",

doi = "10.1016/S0168-583X(98)00600-4",

language = "Dutch",

volume = "147",

pages = "216 -- 220",

journal = "Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "ELSEVIER SCIENCE BV",

number = "1-4",

}

TY - JOUR

T1 - Hydrogen implantation defects in MgO

AU - van Veen, A.

AU - Schut, H.

AU - Fedorov, A.V.

AU - Neeft, E.A.C.

AU - Konings, R.J.M.

AU - Kooi, B.J.

AU - de Hosson, J.T.M.

N1 - Journal JAN 153RK NUCL INSTRUM METH PHYS RES B

PY - 1999

Y1 - 1999

KW - positron

KW - ion implantation

KW - hydrogen

KW - deuterium

KW - oxide

KW - SILICON

KW - OXIDE

U2 - 10.1016/S0168-583X(98)00600-4

DO - 10.1016/S0168-583X(98)00600-4

M3 - Article

VL - 147

SP - 216

EP - 220

JO - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms

SN - 0168-583X

IS - 1-4

T2 - Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics, at the Spring Meeting of the European-Materials-Research-Society

Y2 - 16 June 1998 through 19 June 1998

ER -