Original language | Dutch |
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Pages (from-to) | 216 - 220 |
Number of pages | 5 |
Journal | Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms |
Volume | 147 |
Issue number | 1-4 |
DOIs | |
Publication status | Published - 1999 |
Event | Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics, at the Spring Meeting of the European-Materials-Research-Society - , France Duration: 16-Jun-1998 → 19-Jun-1998 |
Keywords
- positron
- ion implantation
- hydrogen
- deuterium
- oxide
- SILICON
- OXIDE