Influence functions for a hysteretic deformable mirror with a high-density 2D array of actuators

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We present modeling and analysis of a hysteretic deformable mirror where the facesheet interacts with a continuous layer of piezoelectric material that can be actuated distributively by a matrix of electrodes through multiplexing. Moreover, a method to calculate the actuator influence functions is described considering the particular arrangement of electrodes. The results are presented in a semi-analytical model to describe the facesheet's deformation caused by a high-density array of actuators, and validated in a simulation. The proposed modeling of an interconnection layout of electrodes is used to determine the optimal pressures the actuators must exert to achieve a desired surface deformation.

Original languageEnglish
Pages (from-to)8077-8088
Number of pages12
JournalApplied Optics
Issue number27
Publication statusPublished - 20-Sep-2020


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