Influence of nitrogen doping on different properties of a-C: H

R. Hauert, A. Glisenti, S. Metin, J. Goitia, J.H. Kaufman, P.H.M. van Loosdrecht, A.J. Kellock, P. Hoffmann, R.L. White, B.D. Hermsmeier

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Amorphous hydrogenated carbon (a-C:H) exhibits outstanding properties such as high hardness, low mechanical wear and friction, high thermal conductivity, etc. These properties are irreversibly altered above 400 °C. Doping the a-C:H films with nitrogen revealed the possibility to continuously tune properties such as internal stress, hardness, electrical conductivity and surface energy. X-ray photoelectron spectroscopy has been used to analyze the chemical and structural modifications caused by the introduction of nitrogen into the films. An increased onset temperature of the thermal C-H bond decomposition in a-C:H films up to 600 °C (in vacuum) is observed. Hardness measurements on N-doped samples show an increase in thermal stability of the films, however, without ever reaching the hardness values obtained from the undoped a-C:H film.
Original languageEnglish
Pages (from-to)22-29
Number of pages8
JournalThin Solid Films
Issue number1-2
Publication statusPublished - 1995

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