Influence of random roughness on cantilever resonance frequency

O. Ergincan, G. Palasantzas*

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
198 Downloads (Pure)

Abstract

In this paper we investigate the influence of random roughness on the oscillation frequency of cantilevers coated with thin film overlayers. First the theory expressions for the roughness-induced frequency shift are derived using the cantilever equation of motion. Subsequently it is shown that the roughness induced shift depends on the particular roughness parameters, assuming the general case of self-affine rough surfaces for the overlayer film, the material properties of the overlayer film, and the dimensions mainly of the bare cantilever. Indeed it is shown that the roughness influence becomes significant for relatively thin cantilevers (0.5) within the limits of applicability of the proposed formalism. The results of this study can be used in high precision frequency sensing applications in the field of micro/nanomechanics.

Original languageEnglish
Article number155438
Pages (from-to)155438-1-155438-6
Number of pages6
JournalPhysical Review. B: Condensed Matter and Materials Physics
Volume82
Issue number15
DOIs
Publication statusPublished - 19-Oct-2010

Keywords

  • SELF-ASSEMBLED MONOLAYERS
  • ATOMIC-FORCE MICROSCOPY
  • SURFACE STRESS
  • NANOELECTROMECHANICAL SYSTEMS
  • MICROCANTILEVERS
  • RESONATORS
  • INTERFACES
  • CRYSTALS
  • KINETICS

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