Ion diagnostics for extreme ultraviolet nanolithography

Lucas Poirier

Research output: ThesisThesis defended at external organisation, UG (co)promotor, external graduate (EDEP)

Original languageEnglish
Awarding Institution
  • VU University Amsterdam
Supervisors/Advisors
  • Versolato, O. O., Supervisor, External person
  • Hoekstra, Ronnie, Supervisor
  • Sheil, John, Co-supervisor, External person
Award date6-Oct-2023
Publication statusPublished - 2023
Externally publishedYes

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