Abstract
In this work, 0.96(K0.48Na0.52)0.95Li0.05Nb0.94Sb0.06O3−0.04Ba0.94Ca0.06ZrO3 (KNLNS-BCZ) and 0. 9S(K0.48Na0.52)0.95Li0.05Nb0.95Sb0.05O3−0.02Ba0.5(Bi0.5Na0.5)0.5ZrO3 (KNLNS-BBNZ) ferroelectric thin films were obtained by pulsed laser deposition. The structural, and morphological characteristics were studied to determine the best deposition parameters and analyse the piezoelectric properties. The studied deposition parameters were temperature, laser fluence, oxygen partial pressure and frequency. These parameters impact important characteristics of the thin films like grain morphology, thickness, and roughness. KNLNS-BCZ thin films with pure perovskite structure, homogeneous grain growth, and thickness ≥100 nm were fabricated at 700∘C,2J/cm2,300 mTorr, and frequencies of 5 Hz and 10 Hz. These films presented good ferroelectric behaviour and piezoelectric coefficient d 33eff of 83.80 pm/V and 25.80 pm/V, respectively.
Original language | English |
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Title of host publication | 2022 IEEE International Symposium on Applications of Ferroelectrics, Piezoresponse Force Microscopy and European Conference on Applications of Polar Dielectrics, ISAF-PFM-ECAPD 2022 |
Place of Publication | Tours, France |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Number of pages | 4 |
ISBN (Electronic) | 9781665448413 |
DOIs | |
Publication status | Published - 2-Sept-2022 |
Event | 2022 IEEE International Symposium on Applications of Ferroelectrics, ISAF 2022 - Tours, France Duration: 27-Jun-2022 → 1-Jul-2022 |
Conference
Conference | 2022 IEEE International Symposium on Applications of Ferroelectrics, ISAF 2022 |
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Country/Territory | France |
City | Tours |
Period | 27/06/2022 → 01/07/2022 |
Keywords
- and KNNbased.
- Lead-free thin films
- PLD method