Limit to mass sensitivity of nanoresonators with random rough surfaces due to intrinsic sources and interactions with the surrounding gas

G. Palasantzas*

*Corresponding author for this work

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Abstract

We investigate initially the influence of thermomechanical and momentum exchange noise on the limit to mass sensitivity Delta m of nanoresonators with random rough surfaces, which are characterized by the roughness amplitude w, the correlation length xi, and the roughness exponent 0 <H <1. In fact, Delta m increases with increasing roughness (decreasing H and/or increasing ratio w/xi) if the quality factor associated with thermomechanical noise is larger than that due to momentum exchange noise. Finally, the influence of adsorption-desorption noise, which is also influenced by the surface morphology, is shown to play a minimal role in the presence of the other two noise sources.
Original languageEnglish
Article number016107
Pages (from-to)016107-1 - 016107-3
Number of pages3
JournalJournal of Applied Physics
Volume104
Issue number1
DOIs
Publication statusPublished - 1-Jul-2008

Keywords

  • NANOELECTROMECHANICAL SYSTEMS
  • NANOMECHANICAL RESONATORS
  • NOISE
  • DISPLACEMENT
  • SPECTRUM
  • SENSORS

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