Optical absorption in TiNxOy-compounds

E. Vogelzang; J. Sjollema; H. J. Boer; J. Th. M.  de Hosson

doi:10.1063/1.338370

Optical absorption in TiNxOy-compounds

E. Vogelzang, J. Sjollema, H. J. Boer, J. Th. M. de Hosson

Zernike Institute for Advanced Materials

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Abstract

Thin films of Ti, TiNx, and TiNxOy were prepared by dc reactive magnetron sputtering. The normal spectral reflectance and transmittance of films were measured in the spectral region of 0.4–25 µm. The free electron contribution to the optical properties has been determined from measurements of the Hall coefficient and the dc resistivity. Optical band-band transitions, that are found in TiNxOy, are compared to the calculated band structure of TiN and TiO.

Original language	English
Pages (from-to)	4606-4611
Number of pages	6
Journal	Journal of Applied Physics
Volume	61
Issue number	9
DOIs	https://doi.org/10.1063/1.338370
Publication status	Published - 1-May-1987

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title = "Optical absorption in TiNxOy-compounds",

abstract = "Thin films of Ti, TiNx, and TiNxOy were prepared by dc reactive magnetron sputtering. The normal spectral reflectance and transmittance of films were measured in the spectral region of 0.4–25 µm. The free electron contribution to the optical properties has been determined from measurements of the Hall coefficient and the dc resistivity. Optical band-band transitions, that are found in TiNxOy, are compared to the calculated band structure of TiN and TiO.",

author = "E. Vogelzang and J. Sjollema and Boer, {H. J.} and {de Hosson}, {J. Th. M.}",

note = "Relation: http://www.rug.nl/natuurkunde/ date_submitted:2006 Rights: University of Groningen. Materials Science Centre",

year = "1987",

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doi = "10.1063/1.338370",

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T1 - Optical absorption in TiNxOy-compounds

AU - Vogelzang, E.

AU - Sjollema, J.

AU - Boer, H. J.

AU - de Hosson, J. Th. M.

N1 - Relation: http://www.rug.nl/natuurkunde/ date_submitted:2006 Rights: University of Groningen. Materials Science Centre

PY - 1987/5/1

Y1 - 1987/5/1

N2 - Thin films of Ti, TiNx, and TiNxOy were prepared by dc reactive magnetron sputtering. The normal spectral reflectance and transmittance of films were measured in the spectral region of 0.4–25 µm. The free electron contribution to the optical properties has been determined from measurements of the Hall coefficient and the dc resistivity. Optical band-band transitions, that are found in TiNxOy, are compared to the calculated band structure of TiN and TiO.

AB - Thin films of Ti, TiNx, and TiNxOy were prepared by dc reactive magnetron sputtering. The normal spectral reflectance and transmittance of films were measured in the spectral region of 0.4–25 µm. The free electron contribution to the optical properties has been determined from measurements of the Hall coefficient and the dc resistivity. Optical band-band transitions, that are found in TiNxOy, are compared to the calculated band structure of TiN and TiO.

U2 - 10.1063/1.338370

DO - 10.1063/1.338370

M3 - Article

SN - 0021-8979

VL - 61

SP - 4606

EP - 4611

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 9

ER -