Optical absorption in TiNxOy-compounds

E. Vogelzang, J. Sjollema, H. J. Boer, J. Th. M. de Hosson

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Thin films of Ti, TiNx, and TiNxOy were prepared by dc reactive magnetron sputtering. The normal spectral reflectance and transmittance of films were measured in the spectral region of 0.4–25 µm. The free electron contribution to the optical properties has been determined from measurements of the Hall coefficient and the dc resistivity. Optical band-band transitions, that are found in TiNxOy, are compared to the calculated band structure of TiN and TiO.
Original languageEnglish
Pages (from-to)4606-4611
Number of pages6
JournalJournal of Applied Physics
Issue number9
Publication statusPublished - 1-May-1987

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