PDMS Flow Sensors With Graphene Piezoresistors Using 3D Printing and Soft Lithography

Amar M Kamat*, Bayu Jayawardhana, Ajay Giri Prakash Kottapalli

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
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Abstract

This paper reports the fabrication and characterization of a flexible piezoresistive flow sensor comprising a polydimethylsiloxane (PDMS) cantilever with a serpentine graphene nanoplatelets (GNP) strain gauge embedded at the cantilever base. A facile and cleanroom-free processing work flow involving a combination of high-resolution powder bed fusion and soft lithography was used to fabricate PDMS cantilevers (aspect ratio 20) with 150 µm × 150 µm microchannels on its surface. A high gauge factor of 55 (up to 5 times higher than reported in comparable piezoresistive flow sensors) was achieved using drop-casted GNP ink as the piezoresistive sensing element in the aforementioned microchannels. Finally, the use of the PDMS-graphene cantilever as an airflow sensor with enhanced sensitivity (20 times more than comparable piezoresistive cantilever sensors), low hysteresis, good repeatability, and bidirectional sensing capability was demonstrated.
Original languageEnglish
Title of host publication2020 IEEE SENSORS Proceedings
PublisherIEEE
Number of pages4
ISBN (Electronic)978-1-7281-6801-2
ISBN (Print)978-1-7281-6802-9
DOIs
Publication statusPublished - 2020
EventIEEE Sensors 2020: Virtual Conference - Online, Rotterdam, Netherlands
Duration: 25-Oct-202028-Oct-2020
https://2020.ieee-sensorsconference.org/

Conference

ConferenceIEEE Sensors 2020
Country/TerritoryNetherlands
CityRotterdam
Period25/10/202028/10/2020
Internet address

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