This paper reports the fabrication and characterization of a flexible piezoresistive flow sensor comprising a polydimethylsiloxane (PDMS) cantilever with a serpentine graphene nanoplatelets (GNP) strain gauge embedded at the cantilever base. A facile and cleanroom-free processing work flow involving a combination of high-resolution powder bed fusion and soft lithography was used to fabricate PDMS cantilevers (aspect ratio 20) with 150 µm × 150 µm microchannels on its surface. A high gauge factor of 55 (up to 5 times higher than reported in comparable piezoresistive flow sensors) was achieved using drop-casted GNP ink as the piezoresistive sensing element in the aforementioned microchannels. Finally, the use of the PDMS-graphene cantilever as an airflow sensor with enhanced sensitivity (20 times more than comparable piezoresistive cantilever sensors), low hysteresis, good repeatability, and bidirectional sensing capability was demonstrated.
|Title of host publication||2020 IEEE SENSORS Proceedings|
|Number of pages||4|
|Publication status||Published - 2020|
|Event||IEEE Sensors 2020: Virtual Conference - Online, Rotterdam, Netherlands|
Duration: 25-Oct-2020 → 28-Oct-2020
|Conference||IEEE Sensors 2020|
|Period||25/10/2020 → 28/10/2020|