Polycrystalline silicon for silicon-on-insulator devices

Enno Johan Korma

Research output: Thesis › Thesis fully internal (DIV)

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Keywords

@phdthesis{3c146037ad884c7595e36cb051d0b761,

title = "Polycrystalline silicon for silicon-on-insulator devices",

keywords = "Proefschriften (vorm), Silicium, Polykristallijne stoffen, Isolatoren , Halfgeleide",

author = "Korma, {Enno Johan}",

note = "date_submitted:2008 Rights: University of Groningen",

year = "1986",

language = "English",

publisher = "s.n.",

}