Spectral characterization of solid-state laser-driven plasma sources of EUV light

Ruben Schupp

Research output: ThesisThesis defended at external organisation, UG (co)promotor, external graduate (EDEP)

Original languageEnglish
QualificationDoctor of Philosophy
  • Versolato, O. O., Supervisor, External person
  • Ubachs, Wim, Supervisor, External person
  • Hoekstra, Ronnie, Supervisor
Award date17-Mar-2021
Place of Publication[Amsterdam]
Publication statusPublished - 2021
Externally publishedYes

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