Spectroscopy of highly-charged Sn ions for extreme ultraviolet nanolithography

Francesco Torretti

Research output: ThesisThesis defended at external organisation, UG (co)promotor, external graduate (EDEP)

Original languageEnglish
QualificationDoctor of Philosophy
Supervisors/Advisors
  • Versolato, O. O., Supervisor, External person
  • Hoekstra, Ronnie, Supervisor
  • Ubachs, Wim, Supervisor, External person
Award date19-Dec-2019
Place of Publication[Amsterdam]
Publisher
Publication statusPublished - 2019
Externally publishedYes

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