Structural effects due to the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion beam assisted deposition

J.P. Holgado; R. Escobar Galindo; A. van Veen; H. Schut; J.T.M. de Hosson; A.R. Gonzalez-Elipe

doi:10.1016/S0168-583X(02)00695-X

Structural effects due to the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion beam assisted deposition

J.P. Holgado, R. Escobar Galindo, A. van Veen, H. Schut, J.T.M. de Hosson, A.R. Gonzalez-Elipe

Zernike Institute for Advanced Materials

Research output: Contribution to journal › Article › Academic › peer-review

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Original language	Dutch
Article number	PII S0168-583X(02)00695-X
Pages (from-to)	333 - 345
Number of pages	13
Journal	Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
Volume	194
Issue number	3
DOIs	https://doi.org/10.1016/S0168-583X(02)00695-X
Publication status	Published - 2002

Keywords

chemical vapour deposition
ion bombardment
thin film
positron annihilation
phase transformation
ion assisted deposition
ZrO2
CHEMICAL-VAPOR-DEPOSITION
STABILIZED ZIRCONIA FILMS
INDUCED CVD
GROWTH
SPECTROSCOPY
LAYERS
MOCVD

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Holgado, J. P., Escobar Galindo, R., van Veen, A., Schut, H., de Hosson, J. T. M., & Gonzalez-Elipe, A. R. (2002). Structural effects due to the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion beam assisted deposition. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, 194(3), 333 - 345. Article PII S0168-583X(02)00695-X. https://doi.org/10.1016/S0168-583X(02)00695-X

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title = "Structural effects due to the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion beam assisted deposition",

keywords = "chemical vapour deposition, ion bombardment, thin film, positron annihilation, phase transformation, ion assisted deposition, ZrO2, CHEMICAL-VAPOR-DEPOSITION, STABILIZED ZIRCONIA FILMS, INDUCED CVD, GROWTH, SPECTROSCOPY, LAYERS, MOCVD",

author = "J.P. Holgado and {Escobar Galindo}, R. and {van Veen}, A. and H. Schut and {de Hosson}, J.T.M. and A.R. Gonzalez-Elipe",

note = "Journal SEP 593XM NUCL INSTRUM METH PHYS RES B",

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doi = "10.1016/S0168-583X(02)00695-X",

language = "Dutch",

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Holgado, JP, Escobar Galindo, R, van Veen, A, Schut, H, de Hosson, JTM & Gonzalez-Elipe, AR 2002, 'Structural effects due to the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion beam assisted deposition', Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, vol. 194, no. 3, PII S0168-583X(02)00695-X, pp. 333 - 345. https://doi.org/10.1016/S0168-583X(02)00695-X

Structural effects due to the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion beam assisted deposition. / Holgado, J.P.; Escobar Galindo, R.; van Veen, A. et al.
In: Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, Vol. 194, No. 3, PII S0168-583X(02)00695-X, 2002, p. 333 - 345.

Research output: Contribution to journal › Article › Academic › peer-review

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T1 - Structural effects due to the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion beam assisted deposition

AU - Holgado, J.P.

AU - Escobar Galindo, R.

AU - van Veen, A.

AU - Schut, H.

AU - de Hosson, J.T.M.

AU - Gonzalez-Elipe, A.R.

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KW - chemical vapour deposition

KW - ion bombardment

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KW - positron annihilation

KW - phase transformation

KW - ion assisted deposition

KW - ZrO2

KW - CHEMICAL-VAPOR-DEPOSITION

KW - STABILIZED ZIRCONIA FILMS

KW - INDUCED CVD

KW - GROWTH

KW - SPECTROSCOPY

KW - LAYERS

KW - MOCVD

U2 - 10.1016/S0168-583X(02)00695-X

DO - 10.1016/S0168-583X(02)00695-X

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SP - 333

EP - 345

JO - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms

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Holgado JP, Escobar Galindo R, van Veen A, Schut H, de Hosson JTM, Gonzalez-Elipe AR. Structural effects due to the incorporation of Ar atoms in the lattice of ZrO2 thin films prepared by ion beam assisted deposition. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms. 2002;194(3):333 - 345. PII S0168-583X(02)00695-X. doi: 10.1016/S0168-583X(02)00695-X