Structure of reactively sputtered nickel nitride films

G.J.W.R. Dorman^*, M. Sikkens

^*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

48 Citations (Scopus)

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@article{22a062bebe8149649209b8b7a09202fb,

title = "Structure of reactively sputtered nickel nitride films",

author = "G.J.W.R. Dorman and M. Sikkens",

year = "1983",

doi = "10.1016/0040-6090(83)90290-0",

language = "English",

volume = "105",

pages = "251--258",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier Science",

number = "3",

}