We performed noise measurements to obtain the quality factor (Q) and frequency shift of gold coated microcantilevers before and after surface modification using focused ion beam. As a result of our studies, it is demonstrated that surface engineering offers a promising method to control and increase the Q factor up to 50% for operation in vacuum. Surface modification could also lead to deviations from the known Q similar to P-1 behavior at low vacuum pressures P within the molecular regime. Finally, at higher pressures within the continuum regime, where Q is less sensitive to surface changes, a power scaling Q similar to P-c with c approximate to 0.3 was found instead of c = 0.5. The latter is explained via a semi-empirical formulation to account for continuum dissipation mechanisms at significant Reynolds numbers Re similar to 1.
- ATOMIC-FORCE MICROSCOPE
- NANOELECTROMECHANICAL SYSTEMS