Surface-roughness effect on capacitance and leakage current of an insulating film

Y.P. Zhao, G.C. Wang, T.M. Lu, G. Palasantzas, J.T.M. de Hosson

Research output: Contribution to journalArticleAcademicpeer-review

155 Citations (Scopus)
572 Downloads (Pure)
Original languageDutch
Pages (from-to)9157 - 9164
Number of pages8
JournalPhysical Review B
Volume60
Issue number12
DOIs
Publication statusPublished - 1999

Keywords

  • HEIGHT-HEIGHT CORRELATION
  • INTERFACE ROUGHNESS
  • THIN-FILMS
  • QUANTUM-WELLS
  • X-RAY
  • SCATTERING
  • OXIDE
  • LIMIT
  • CONDUCTIVITY
  • DEPOSITION

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