Surface roughness evolution of nanocomposite thin films

A. A. Turkin; Y. T. Pei; K. P. Shaha; C. Q. Chen; D. I. Vainchtein; J. Th. M.  de Hosson

doi:10.1063/1.3037237

Surface roughness evolution of nanocomposite thin films

A. A. Turkin, Y. T. Pei, K. P. Shaha, C. Q. Chen, D. I. Vainchtein, J. Th. M. de Hosson

Zernike Institute for Advanced Materials

Research output: Contribution to journal › Article › Academic › peer-review

16 Citations (Scopus)

405 Downloads (Pure)

Abstract

An analysis of dynamic roughening and smoothening mechanisms of thin films grown with pulsed-dc magnetron sputtering is presented. The roughness evolution has been described by a linear stochastic equation, which contains the second- and fourth-order gradient terms. Dynamic smoothening of the growing interface is explained by ballistic effects resulting from impingements of ions to the growing thin film. These ballistic effects are sensitive to the flux and energy of impinging ions. The predictions of the model are compared with experimental data, and it is concluded that the thin film roughness can be further controlled by adjusting waveform, frequency, and width of dc pulses.

Original language	English
Article number	013523
Pages (from-to)	013523-1-013523-7
Number of pages	7
Journal	Journal of Applied Physics
Volume	105
Issue number	1
DOIs	https://doi.org/10.1063/1.3037237
Publication status	Published - 1-Jan-2009

Keywords

DIAMOND-LIKE CARBON
AMORPHOUS-CARBON
DLC FILMS
GROWTH
DEPOSITION
SUBPLANTATION

Access to Document

10.1063/1.3037237

Surface roughness evolution of nanocomposite thin filmsFinal publisher's version, 477 KBLicence: Unspecified

Handle.net

Persistent link

Cite this

@article{435b34e9f4244a36928fb18822be903b,

title = "Surface roughness evolution of nanocomposite thin films",

abstract = "An analysis of dynamic roughening and smoothening mechanisms of thin films grown with pulsed-dc magnetron sputtering is presented. The roughness evolution has been described by a linear stochastic equation, which contains the second- and fourth-order gradient terms. Dynamic smoothening of the growing interface is explained by ballistic effects resulting from impingements of ions to the growing thin film. These ballistic effects are sensitive to the flux and energy of impinging ions. The predictions of the model are compared with experimental data, and it is concluded that the thin film roughness can be further controlled by adjusting waveform, frequency, and width of dc pulses. ",

keywords = "DIAMOND-LIKE CARBON, AMORPHOUS-CARBON, DLC FILMS, GROWTH, DEPOSITION, SUBPLANTATION",

author = "Turkin, {A. A.} and Pei, {Y. T.} and Shaha, {K. P.} and Chen, {C. Q.} and Vainchtein, {D. I.} and {de Hosson}, {J. Th. M.}",

note = "Relation: http://www.rug.nl/research/zernike/ Rights: University of Groningen, Zernike Institute for Advanced Materials",

year = "2009",

month = jan,

day = "1",

doi = "10.1063/1.3037237",

language = "English",

volume = "105",

pages = "013523--1--013523--7",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "AMER INST PHYSICS",

number = "1",

}

TY - JOUR

T1 - Surface roughness evolution of nanocomposite thin films

AU - Turkin, A. A.

AU - Pei, Y. T.

AU - Shaha, K. P.

AU - Chen, C. Q.

AU - Vainchtein, D. I.

AU - de Hosson, J. Th. M.

N1 - Relation: http://www.rug.nl/research/zernike/ Rights: University of Groningen, Zernike Institute for Advanced Materials

PY - 2009/1/1

Y1 - 2009/1/1

N2 - An analysis of dynamic roughening and smoothening mechanisms of thin films grown with pulsed-dc magnetron sputtering is presented. The roughness evolution has been described by a linear stochastic equation, which contains the second- and fourth-order gradient terms. Dynamic smoothening of the growing interface is explained by ballistic effects resulting from impingements of ions to the growing thin film. These ballistic effects are sensitive to the flux and energy of impinging ions. The predictions of the model are compared with experimental data, and it is concluded that the thin film roughness can be further controlled by adjusting waveform, frequency, and width of dc pulses.

AB - An analysis of dynamic roughening and smoothening mechanisms of thin films grown with pulsed-dc magnetron sputtering is presented. The roughness evolution has been described by a linear stochastic equation, which contains the second- and fourth-order gradient terms. Dynamic smoothening of the growing interface is explained by ballistic effects resulting from impingements of ions to the growing thin film. These ballistic effects are sensitive to the flux and energy of impinging ions. The predictions of the model are compared with experimental data, and it is concluded that the thin film roughness can be further controlled by adjusting waveform, frequency, and width of dc pulses.

KW - DIAMOND-LIKE CARBON

KW - AMORPHOUS-CARBON

KW - DLC FILMS

KW - GROWTH

KW - DEPOSITION

KW - SUBPLANTATION

U2 - 10.1063/1.3037237

DO - 10.1063/1.3037237

M3 - Article

SN - 0021-8979

VL - 105

SP - 013523-1-013523-7

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 1

M1 - 013523

ER -

Surface roughness evolution of nanocomposite thin films

Abstract

Keywords

Access to Document

Handle.net

Fingerprint

Cite this