Synthesis and Fabrication of Hafnium Zirconium Oxide (HZO) /P(VDF-TrFE) Flexible Piezoelectric Composite Films

This paper presents the synthesis and fabrication of Hafnium zirconium oxide/Polyvinylidene Fluoride-Trifluoroethylene (HZO/P(VDF-TrFE)) flexible piezoelectric films. Metallo-organic decomposition method from a low-toxicity chemical solution was used for synthesis of Hf 0.5 Zr 0.5 O 2 particles in cubic+monoclinic phase. Addition of 5 wt% of such particles into P(VDF-TrFE) matrix increases the d 33 coefficient, the dielectric constant, and the sensitivity of the films. Compared to a cantilever energy harvesting system made with pure P(VDF-TrFE), the 5 wt% HZO composite cantilever produces 67.6% and 122% higher output voltage at first and second resonance frequency, respectively. These interesting results are promising for future low frequency applications, such as wearable devices, based on non-toxic and sensitive ferroelectric/piezoelectric composites with hafnium and zirconium-based oxides.