Ultra-high depth resolution RES and SIMS of the modification of a Ge delta in Si during 2 keV O-2(+) sputtering

W.M. Arnoldbik, Z.X. Jiang, P.F.A. Alkemade, D.O Boerma

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Dutch
Pages (from-to)	540 - 544
Journal	Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
Volume	138
Publication status	Published - 1998

Handle.net

@article{6c82cb1c8b504504860f5191f64e7010,

title = "Ultra-high depth resolution RES and SIMS of the modification of a Ge delta in Si during 2 keV O-2(+) sputtering",

author = "W.M. Arnoldbik and Z.X. Jiang and P.F.A. Alkemade and D.O Boerma",

note = "Journal MAR ZW154 NUCL INSTRUM METH PHYS RES B",

year = "1998",

language = "Dutch",

volume = "138",

pages = "540 -- 544",

journal = "Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms",

publisher = "ELSEVIER SCIENCE BV",

}

Research output: Contribution to journal › Article › Academic › peer-review

TY - JOUR

T1 - Ultra-high depth resolution RES and SIMS of the modification of a Ge delta in Si during 2 keV O-2(+) sputtering

AU - Arnoldbik, W.M.

AU - Jiang, Z.X.

AU - Alkemade, P.F.A.

AU - Boerma, D.O

N1 - Journal MAR ZW154 NUCL INSTRUM METH PHYS RES B

PY - 1998

Y1 - 1998

M3 - Article

VL - 138

SP - 540

EP - 544

JO - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms

ER -