Ultrathin, sputter-deposited, amorphous alloy films of ruthenium and molybdenum

Görsel Yetik, Alessandro Troglia, Saeedeh Farokhipoor, Stefan van Vliet, Jamo Momand, Bart J. Kooi, Roland Bliem, Joost W.M. Frenken*

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

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Microscopy and diffraction measurements are presented of ultrathin binary alloy films of ruthenium and molybdenum that are obtained by standard sputter deposition. For compositions close to Ru50Mo50, we find the films to be amorphous. The amorphicity of the films is accompanied by a significant reduction of the roughness with respect to the roughness of equally thick films of either ruthenium or molybdenum. We ascribe this to the absence of the grain structure that is characteristic of the polycrystalline films of the separate elements.

Original languageEnglish
Article number128729
Number of pages9
JournalSurface and Coatings Technology
Publication statusPublished - 15-Sept-2022


  • Amorphous materials
  • Metal alloys
  • Molybdenum
  • Ruthenium
  • Sputter deposition
  • Surface roughness
  • Ultrathin films


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