Ultrathin, sputter-deposited, amorphous alloy films of ruthenium and molybdenum

Görsel Yetik; Alessandro Troglia; Saeedeh Farokhipoor; Stefan van Vliet; Jamo Momand; Bart J. Kooi; Roland Bliem; Joost W.M. Frenken

doi:10.1016/j.surfcoat.2022.128729

Ultrathin, sputter-deposited, amorphous alloy films of ruthenium and molybdenum

Görsel Yetik, Alessandro Troglia, Saeedeh Farokhipoor, Stefan van Vliet, Jamo Momand, Bart J. Kooi, Roland Bliem, Joost W.M. Frenken^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

1 Citation (Scopus)

7 Downloads (Pure)

Abstract

Microscopy and diffraction measurements are presented of ultrathin binary alloy films of ruthenium and molybdenum that are obtained by standard sputter deposition. For compositions close to Ru₅₀Mo₅₀, we find the films to be amorphous. The amorphicity of the films is accompanied by a significant reduction of the roughness with respect to the roughness of equally thick films of either ruthenium or molybdenum. We ascribe this to the absence of the grain structure that is characteristic of the polycrystalline films of the separate elements.

Original language	English
Article number	128729
Number of pages	9
Journal	Surface and Coatings Technology
Volume	445
DOIs	https://doi.org/10.1016/j.surfcoat.2022.128729
Publication status	Published - 15-Sept-2022

Keywords

Amorphous materials
Metal alloys
Molybdenum
Ruthenium
Sputter deposition
Surface roughness
Ultrathin films

Access to Document

10.1016/j.surfcoat.2022.128729

1-s2.0-S0257897222006508-mainFinal publisher's version, 7 MBLicence: Taverne

Handle.net

Persistent link

Cite this

@article{1ad47c63c30546aca33e66f3c4fcef45,

title = "Ultrathin, sputter-deposited, amorphous alloy films of ruthenium and molybdenum",

abstract = "Microscopy and diffraction measurements are presented of ultrathin binary alloy films of ruthenium and molybdenum that are obtained by standard sputter deposition. For compositions close to Ru50Mo50, we find the films to be amorphous. The amorphicity of the films is accompanied by a significant reduction of the roughness with respect to the roughness of equally thick films of either ruthenium or molybdenum. We ascribe this to the absence of the grain structure that is characteristic of the polycrystalline films of the separate elements.",

keywords = "Amorphous materials, Metal alloys, Molybdenum, Ruthenium, Sputter deposition, Surface roughness, Ultrathin films",

author = "G{\"o}rsel Yetik and Alessandro Troglia and Saeedeh Farokhipoor and {van Vliet}, Stefan and Jamo Momand and Kooi, {Bart J.} and Roland Bliem and Frenken, {Joost W.M.}",

note = "Funding Information: This work has been carried out at ARCNL – a public-private partnership of the University of Amsterdam (UvA), the VU University Amsterdam, The Dutch Research Council (NWO) and the semiconductor equipment manufacturer ASML – at the University of Groningen and at ASML. Publisher Copyright: {\textcopyright} 2022",

year = "2022",

month = sep,

day = "15",

doi = "10.1016/j.surfcoat.2022.128729",

language = "English",

volume = "445",

journal = "Surface & Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier Science",

}

TY - JOUR

T1 - Ultrathin, sputter-deposited, amorphous alloy films of ruthenium and molybdenum

AU - Yetik, Görsel

AU - Troglia, Alessandro

AU - Farokhipoor, Saeedeh

AU - van Vliet, Stefan

AU - Momand, Jamo

AU - Kooi, Bart J.

AU - Bliem, Roland

AU - Frenken, Joost W.M.

N1 - Funding Information: This work has been carried out at ARCNL – a public-private partnership of the University of Amsterdam (UvA), the VU University Amsterdam, The Dutch Research Council (NWO) and the semiconductor equipment manufacturer ASML – at the University of Groningen and at ASML. Publisher Copyright: © 2022

PY - 2022/9/15

Y1 - 2022/9/15

N2 - Microscopy and diffraction measurements are presented of ultrathin binary alloy films of ruthenium and molybdenum that are obtained by standard sputter deposition. For compositions close to Ru50Mo50, we find the films to be amorphous. The amorphicity of the films is accompanied by a significant reduction of the roughness with respect to the roughness of equally thick films of either ruthenium or molybdenum. We ascribe this to the absence of the grain structure that is characteristic of the polycrystalline films of the separate elements.

AB - Microscopy and diffraction measurements are presented of ultrathin binary alloy films of ruthenium and molybdenum that are obtained by standard sputter deposition. For compositions close to Ru50Mo50, we find the films to be amorphous. The amorphicity of the films is accompanied by a significant reduction of the roughness with respect to the roughness of equally thick films of either ruthenium or molybdenum. We ascribe this to the absence of the grain structure that is characteristic of the polycrystalline films of the separate elements.

KW - Amorphous materials

KW - Metal alloys

KW - Molybdenum

KW - Ruthenium

KW - Sputter deposition

KW - Surface roughness

KW - Ultrathin films

UR - http://www.scopus.com/inward/record.url?scp=85135119413&partnerID=8YFLogxK

U2 - 10.1016/j.surfcoat.2022.128729

DO - 10.1016/j.surfcoat.2022.128729

M3 - Article

AN - SCOPUS:85135119413

SN - 0257-8972

VL - 445

JO - Surface & Coatings Technology

JF - Surface & Coatings Technology

M1 - 128729

ER -

Ultrathin, sputter-deposited, amorphous alloy films of ruthenium and molybdenum

Abstract

Keywords

Access to Document

Handle.net

Other files and links

Cite this