Viscous damping of microcantilevers with modified surfaces and geometries

O. Ergincan, G. Palasantzas*, B. J. Kooi

*Corresponding author for this work

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Abstract

Noise measurements were performed to determine the quality factor Q and the resonating frequency shift as a function of gas pressure P for microcantilevers with modified surfaces and geometries. In the molecular and continuum regimes, energy loss is dominated by the surrounding fluid leading to reduction of the Q factor and shift of the resonance frequency by Delta f, which becomes significant in the continuum regime showing sensitivity on surface changes. This is shown via three methods: frequency shift Delta f vs. P, Q factor vs. P, and direct calculation using surface roughness details acquired via atomic force microscopy. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4744951]
Original languageEnglish
Article number061908
Pages (from-to)061908-1-061908-4
Number of pages4
JournalApplied Physics Letters
Volume101
Issue number6
DOIs
Publication statusPublished - 6-Aug-2012

Keywords

  • NANOELECTROMECHANICAL SYSTEMS
  • NANOCRYSTALLINE-DIAMOND
  • RESONATORS
  • FRICTION

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