Smart Hysteretic Piezoelectric Actuator for Set and Forget wafer table

Pers / media: Onderzoek › Academic

Periode	16-feb.-2023

Mediabijdrages

Titel	Smart Hysteretic Piezoelectric Actuator for Set and Forget wafer table
Land/Regio	Netherlands
Release datum	16/02/2023
URL	https://www.hollandhightech.nl/jaaroverzicht2022/home/nieuws/smart-hysteretic-piezoelectric-actuator-for-set-and-forget-wafer-table
Personen	Mónica Acuautla Meneses