DECHANNELING CAUSED BY UNIDIRECTIONAL CONTRACTION IN BORON IMPLANTED LASER-ANNEALED SILICON

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Originele taal-2	English
Pagina's (van-tot)	340-344
Aantal pagina's	5
Tijdschrift	Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
Volume	19-20
Status	Published - feb.-1987

Handle.net

@article{976e1b991faf4aca90335f5bce93d08c,

title = "DECHANNELING CAUSED BY UNIDIRECTIONAL CONTRACTION IN BORON IMPLANTED LASER-ANNEALED SILICON",

author = "M VOS and DO BOERMA",

year = "1987",

month = feb,

language = "English",

volume = "19-20",

pages = "340--344",

journal = "Nuclear Instruments \& Methods in Physics Research Section B-Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "ELSEVIER SCIENCE BV",

}

TY - JOUR

T1 - DECHANNELING CAUSED BY UNIDIRECTIONAL CONTRACTION IN BORON IMPLANTED LASER-ANNEALED SILICON

AU - VOS, M

AU - BOERMA, DO

PY - 1987/2

Y1 - 1987/2

M3 - Article

SN - 0168-583X

VL - 19-20

SP - 340

EP - 344

JO - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms

ER -