Direct Laser patterning of a gas sensor on flexible substrate

Mónica Isela Acuautla Meneses, Sandrine Bernardini, Laurent Gallais, Marc Bendahan

OnderzoeksoutputAcademicpeer review

6 Citaten (Scopus)
41 Downloads (Pure)

Samenvatting

Flexible gas sensor fabricated by direct laser patterning and its gas sensing properties towards ozone and ammonia are reported.The flexible platform consists in Ti/Pt interdigited electrodes for gas detection and a microheater device. The platform validation has been realized by thermal simulation and its electrical properties have been also studied. The gas sensing properties were investigated using a commercial ink of ZnO nanoparticles at several concentrations and temperatures. The sensor presents excellent responses toward ammonia and ozone at 300 °C and 200 C° respectively, with good reproducibility, and fast response
and recovery time in a wide range of concentrations
Originele taal-2English
Pagina's (van-tot)899-902
Aantal pagina's4
TijdschriftProcedia Engineering
Volume87
DOI's
StatusPublished - 2014
Extern gepubliceerdJa

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