TY - GEN
T1 - Dislocation dynamic simulations of metal nanoimprinting
AU - Zhang, Yunhe
AU - Van Der Giessen, Erik
AU - Nicola, Lucia
PY - 2010
Y1 - 2010
N2 - Simulations of metal nanoimprinting by a rigid template are performed with the aim of finding the optimal conditions to retain imprints in a thin film on a substrate. Specifically, attention is focussed on the interface conditions between film and substrate and on the template shape. Deeper imprints are obtained when the interface between film and substrate is penetrable to dislocation motion. When the protruding contacts of the rigid template are closely spaced the interaction between neighboring contacts gives rise to material pile-ups between imprints.
AB - Simulations of metal nanoimprinting by a rigid template are performed with the aim of finding the optimal conditions to retain imprints in a thin film on a substrate. Specifically, attention is focussed on the interface conditions between film and substrate and on the template shape. Deeper imprints are obtained when the interface between film and substrate is penetrable to dislocation motion. When the protruding contacts of the rigid template are closely spaced the interaction between neighboring contacts gives rise to material pile-ups between imprints.
UR - http://www.scopus.com/inward/record.url?scp=78649309897&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:78649309897
SN - 9781605111971
T3 - Materials Research Society Symposium Proceedings
SP - 199
EP - 204
BT - Mechanical Behavior at Small Scales - Experiments and Modeling
PB - Cambridge University Press
T2 - 2009 MRS Fall Meeting
Y2 - 29 November 2009 through 3 December 2009
ER -