@inproceedings{2e940c6331284bf3927dddd62c80b7ff,
title = "Dynamic smoothening and tribological properties of pulsed-DC sputtered DLC based nanocomposite films",
abstract = "Interface roughness and dynamic growth behavior of TiC/a-C nanocomposite films deposited by pulsed-DC magnetron sputtering were studied using atomic force microscopy and scanning electron microscopy. Upon increasing the intensity of concurrent ion impingement by raising the frequency of pulsed-DC sputtering, a transition from dynamic roughening to dynamic smoothening is revealed in the growth behavior of TiC/a-C nanocomposite films. Analyses of surface morphology and growth conditions imply that there is a transition of dominating growth mechanism from geometric shadowing to surface diffusion driven by impact-induced atomistic downhill flow process due to enhanced impingement of Ar+ ions, which occurs upon the change of pulse frequency from 100 kHz to 350 kHz. Also ultra-smooth TiC/a-C:H films were successfully grown on initial rough steel substrates (Sa similar to 6 nm) by pulsed-DC sputtering at 200 and 350 kHz frequency. These nanocomposite films exhibit superb toughness, vicar resistance and ultralow friction.",
keywords = "dynamic roughening, smoothening, nanocomposite, rough substrates, pulsed-DC sputtering, GROWTH, EVOLUTION, COATINGS, SURFACES, CARBON",
author = "Shaha, {K. P.} and Pei, {Y. T.} and Chen, {C. Q.} and {De Hosson}, {J. Th. M.}",
year = "2009",
doi = "10.2495/SECM090011",
language = "English",
isbn = "978-1-84564-186-3",
series = "WIT Transactions on Engineering Sciences",
publisher = "WIT PRESS/COMPUTATIONAL MECHANICS PUBLICATIONS",
pages = "3--11",
editor = "JTM DeHosson and CA Brebbia",
booktitle = "SURFACE EFFECTS AND CONTACT MECHANICS IX",
note = "9th International Conference on Surface Effects and Contract Mechanics ; Conference date: 09-06-2009 Through 11-06-2009",
}