Energy- and charge-state-resolved spectrometry of tin laser-produced plasma using a retarding field energy analyzer

L. Poirier, A. Lassise, Y. Mostafa, L. Behnke, N. Braaksma, L. Assink, R. Hoekstra, O. O. Versolato*

*Corresponding author voor dit werk

OnderzoeksoutputAcademicpeer review

6 Citaten (Scopus)
43 Downloads (Pure)

Samenvatting

We present a method to obtain the individual charge-state-dependent kinetic-energy distributions of tin ions emanating from a laser-produced plasma from their joint overlapping energy distributions measured by means of a retarding field energy analyzer (RFA). The method of extracting charge state specific parameters from the ion signals is described mathematically, and reinforced with experimental results. The absolute charge-state-resolved ion energy distributions is obtained from ns-pulse Nd:YAG-laser-produced microdroplet tin plasmas in a setting relevant for state-of-the-art extreme ultraviolet nanolithography.

Originele taal-2English
Artikelnummer135
Aantal pagina's7
TijdschriftApplied Physics B: Lasers and Optics
Volume128
Nummer van het tijdschrift7
DOI's
StatusPublished - jul.-2022

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