Fabrication of polymeric microstructures

Amar Mahendra Kamat (Uitvinder), Ajay Giri Prakash Kottapalli (Uitvinder), Yutao Pei (Uitvinder)

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A method for fabricating a three-dimensional (3D) polymeric microstructure is disclosed. The method comprises 3D-printing a metallic mold, the metallic mold including a mold cavity corresponding to the 3D polymeric microstructure, polymer casting in the metallic mold by inserting a liquid polymer into the mold cavity, curing the liquid polymer inside the metallic mold, and etching the metallic mold away from the cured polymer wherein the polymeric microstructure comprises a soft polymeric microelectromechanical systems, MEMS, device, and the soft polymeric MEMS device comprises at least one sensor.
Originele taal-2English
OctrooinummerWO2021094623A1
IPC B22F3/00,B22F5/00,B29C33/38,B29C33/52,B29C39/36,B29C64/153,B29C64/40
Prioriteitsdatum15/11/2019
Indieningsdatum16/11/2020
StatusPublished - 20-mei-2021

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