From 1D to 3D: Tunable Sub-10 nm Gaps in Large Area Devices

Ziwei Zhou, Zhiyuan Zhao, Ye Yu, Bin Ai, Helmuth Möhwald, Ryan C. Chiechi, Joel K. W. Yang, Gang Zhang

OnderzoeksoutputAcademicpeer review

38 Citaten (Scopus)

Samenvatting

Tunable sub-10 nm 1D nanogaps are fabricated based on nanoskiving. The electric field in different sized nanogaps is investigated theoretically and experimentally, yielding nonmonotonic dependence and an optimized gap-width (5 nm). 2D nanogap-arrays are fabricated to pack denser gaps combining surface patterning techniques. Innovatively, 3D multistory nanogaps are built via a stacking procedure, processing higher integration, and much improved electric field.

Originele taal-2English
Pagina's (van-tot)2956-2963
Aantal pagina's8
TijdschriftAdvanced materials
Volume28
Nummer van het tijdschrift15
DOI's
StatusPublished - 18-feb-2016

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