Influence functions for a hysteretic deformable mirror with a high-density 2D array of actuators

A. E. M. Schmerbauch*, M. A. Vasquez-Beltran, A. Vakis, R. Huisman, B. Jayawardhana

*Bijbehorende auteur voor dit werk

OnderzoeksoutputAcademicpeer review

12 Citaten (Scopus)
96 Downloads (Pure)


We present modeling and analysis of a hysteretic deformable mirror where the facesheet interacts with a continuous layer of piezoelectric material that can be actuated distributively by a matrix of electrodes through multiplexing. Moreover, a method to calculate the actuator influence functions is described considering the particular arrangement of electrodes. The results are presented in a semi-analytical model to describe the facesheet's deformation caused by a high-density array of actuators, and validated in a simulation. The proposed modeling of an interconnection layout of electrodes is used to determine the optimal pressures the actuators must exert to achieve a desired surface deformation.

Originele taal-2English
Pagina's (van-tot)8077-8088
Aantal pagina's12
TijdschriftApplied Optics
Nummer van het tijdschrift27
StatusPublished - 20-sep.-2020

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