@article{92a1858fe71242748f3679efcc241ab3,
title = "Membrane-Based Scanning Force Microscopy",
abstract = "We report the development of a scanning force microscope based on an ultrasensitive silicon nitride membrane optomechanical transducer. Our development is made possible by inverting the standard microscope geometry - in our instrument, the substrate is vibrating and the scanning tip is at rest. We present topography images of samples placed on the membrane surface. Our measurements demonstrate that the membrane retains an excellent force sensitivity when loaded with samples and in the presence of a scanning tip. We discuss the prospects and limitations of our instrument as a quantum-limited force sensor and imaging tool.",
author = "David H{\"a}lg and Thomas Gisler and Yeghishe Tsaturyan and Letizia Catalini and Urs Grob and Krass, {Marc Dominik} and Martin H{\'e}ritier and Hinrich Mattiat and Thamm, {Ann Katrin} and Romana Schirhagl and Langman, {Eric C.} and Albert Schliesser and Degen, {Christian L.} and Alexander Eichler",
note = "Funding Information: Acknowledgments. We gratefully acknowledge technical support by the mechanical workshop and the engineering office at ETH Zurich, and thank J. Chen for providing data of quantum-limited optomechanical measurements. This work is supported by the Swiss National Science Foundation (SNFS) through the National Center of Competence in Research in Quantum Science and Technology (NCCR QSIT), the Sinergia grant (CRSII5_177198/1), and the project Grant No. 200020-178863, Danmarks Grundforskningsfond (DNRF) Center of Excellence Hy-Q, the European Research Council through the ERC Starting Grants “NANOMRI” (grant agreement 309301), “Q-CEOM” (grant agreement 638765), ERC proof-of-concept grant “ULTRAFORS” (grant agreement 825797), and a Marie-Curie Fellowship “Nano-MRI” (325866), as well as an ETH research grant (ETH-03 16-1). Funding Information: . We gratefully acknowledge technical support by the mechanical workshop and the engineering office at ETH Zurich, and thank J. Chen for providing data of quantum-limited optomechanical measurements. This work is supported by the Swiss National Science Foundation (SNFS) through the National Center of Competence in Research in Quantum Science and Technology (NCCR QSIT), the Sinergia grant (CRSII5_177198/1), and the project Grant No. 200020-178863, Danmarks Grundforskningsfond (DNRF) Center of Excellence Hy-Q, the European Research Council through the ERC Starting Grants {"}NANOMRI{"} (grant agreement 309301), {"}Q-CEOM{"} (grant agreement 638765), ERC proof-of-concept grant {"}ULTRAFORS{"} (grant agreement 825797), and a Marie-Curie Fellowship {"}Nano-MRI{"} (325866), as well as an ETH research grant (ETH-03 16-1). Publisher Copyright: {\textcopyright} 2021 American Physical Society.",
year = "2021",
month = feb,
doi = "10.1103/PhysRevApplied.15.L021001",
language = "English",
volume = "15",
journal = "Physical Review Applied",
issn = "2331-7043",
publisher = "AMER PHYSICAL SOC",
number = "2",
}