Microstructural characterization of surface damage through ultra-short laser pulses

Engineering

• Damage Surface 100%
• Short Pulse Laser 100%
• Induced Damage 66%
• Primary Beam 66%
• Early Stage 33%
• Similarities 33%
• Damage Accumulation 33%
• Subsurface 33%
• Lateral Displacement 33%
• Accelerating Voltage 33%
• Field Emission 33%
• Scanning Electron Microscope 33%
• Silicon Surface 33%
• Pulsed Laser 33%
• Single Pulse 33%
• Linear Polarization 33%
• Laser Radiation 33%
• Microstructural Characteristic 33%
• Laser Fluence 33%
• Si Surface 33%
• Trumpf 33%

Keyphrases

• FEG-SEM 25%
• Pulsed Laser Radiation 25%
• Feature Center 25%
• Ytterbium-doped 25%
• Crystal Damage 25%