Nanocomposite W-C: H diamond-like carbon coatings

It has been demonstrated that the rotation speed of the substrate table and the gas flow rate of acetylene gas are important process parameters for determining the nano/micro-structure of W-C:H coatings. Either a homogeneous or a pronounced multilayer or a nanocomposite structure of the W-C:H coatings can be obtained by varying the substrate table rotation speed. At low rotation speeds, a pronounced multilayered structure will be deposited and by increasing the speed, a more homogeneous nanocomposite structure will be deposited. At 3 rpm substrate rotation speed, the multilayered structure of the W-C:H coatings will be completely suppressed and it will appear as a homogeneous nanocomposite in structure by high resolution cross-section TEM. By changing the gas flow rate of acetylene, the wavelength of the multilayer structure will change.