@inproceedings{d095717fb1004ddcbdde697d8496072e,
title = "Novel fabrication method for highly conformable THz metasurfaces",
abstract = "The continuously increasing interest in flexible and integrated photonics requires new strategies for device manufacturing on arbitrary complex surfaces and with lowest possible size, respectively. Terahertz (THz) technology can particularly benefit from this approach to implement compact systems for generation, detection and on-demand manipulation of THz radiation. Here we present a novel fabrication method to realize conformable metasurfaces. The flexible and versatile character of polymeric nanomembranes is combined with direct laser writing via two-photon polymerization and metal deposition to develop freestanding ultra-thin quasi-perfect plasmonic absorbers with an unprecedentedly high level of conformability. Moreover, revealing new flexible dielectric materials presenting low absorption and permittivity in the THz range, this work paves the way for the realization of ultra-thin, conformable hybrid or all-dielectric devices enhancing the application of THz technologies, and flexible/integrated photonics in general.",
keywords = "3D printing, direct laser writing, metasurfaces, nanofabrication, terahertz radiation, thin films, two-photon polymerization",
author = "A. Ottomaniello and P. Vezio and O. Tricinci and {Den Hoed}, {F. M.} and A. Tredicucci and V. Mattoli",
note = "Publisher Copyright: {\textcopyright} 2023 SPIE.; Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVI 2023 ; Conference date: 29-01-2023 Through 31-01-2023",
year = "2023",
doi = "10.1117/12.2647705",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "{von Freymann}, Georg and Eva Blasco and Debashis Chanda",
booktitle = "Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVI",
}