Optical absorption in TiNxOy-compounds

E. Vogelzang, J. Sjollema, H. J. Boer, J. Th. M. de Hosson

OnderzoeksoutputAcademicpeer review

28 Citaten (Scopus)
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Samenvatting

Thin films of Ti, TiNx, and TiNxOy were prepared by dc reactive magnetron sputtering. The normal spectral reflectance and transmittance of films were measured in the spectral region of 0.4–25 µm. The free electron contribution to the optical properties has been determined from measurements of the Hall coefficient and the dc resistivity. Optical band-band transitions, that are found in TiNxOy, are compared to the calculated band structure of TiN and TiO.
Originele taal-2English
Pagina's (van-tot)4606-4611
Aantal pagina's6
TijdschriftJournal of Applied Physics
Volume61
Nummer van het tijdschrift9
DOI's
StatusPublished - 1-mei-1987

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